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HO-SE-01 Variable Angle Spectroscopic EllipsometerVariable Angle Spectroscopic Ellipsometer Spectroscopic Ellipsometer is widely used for thin film analysis and measurements. Holmarcs spectroscopic ellipsometer incorporates Rotating Analyzer Ellipsometry technology to characterize thin film samples. It uses a high speed CCD array detection to collect the entire spectrum. It measures films from nanometer thickness up to tens of microns and the optical properties from transparent to absorbing
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Variable Angle Spectroscopic Ellipsometer

Spectroscopic Ellipsometer is widely used for thin film analysis and measurements.

Holmarc’s spectroscopic ellipsometer incorporates Rotating Analyzer Ellipsometry technology to characterize thin film samples. It uses a high speed CCD array detection to collect the entire spectrum. It measures films from nanometer thickness up to tens of microns and the optical properties from transparent to absorbing materials. It accurately measures optical constants like refractive index, film thickness and extinction coefficient.

Our standard system comes with Quartz-Halogen lamp for visible through IR range. Our spectroscopic ellipsometer software allows the user to measure and analyze multilayer thin films and complex thin film structures.

An autocollimator, Z stage and tilt platforms are provided for sample alignment. XY motorized stage and motorized rotation stages are provided as unoptional feature for mapping thin film uniformity.

Specifications:

Spectral range     450 - 800 nm
    Ellipsometer configuration     RAE
    Detector     3648 pixel CCD linear sensor
    Spectral resolution     1 nm
    Incident angle     50 - 75 degree (Resolution 0.1 degree, Automated operation)
    Sample focusing     Automated
    Sample thickness     0.3 mm - 8 mm
    Thickness measurement range     20 nm - 10 microns
    Resolution of film thickness     0.01 nm
    Resolution of measured R.I     0.001
    Sample alignment     Manual tilt
    Sample measurement     Automatic
    Thickness analysis     Advanced mathematical fitting algorithms

Features:

Non-destructive and non-contact technique
    Analysis of single and multilayer samples
    Accurate measurements of ultra-thin films
    Software for measurement, modeling and automatic operations
    All range of (Ψ, Δ) can be measured
    Uniform sensitivity for (Ψ, Δ)

Software Features:

    Automatic operation
    Automatic sample focusing
    User extendable materials library
    Data can be saved as Excel
    Mathematical fitting algorithm
    Multilayer thickness measurement
    Deduction of thickness and optical constants

Drawings:


Fig. Optical Layout of Variable Angle Spectroscopic Ellipsometer

HO-SE-01 Variable Angle Spectroscopic Ellipsometer

Item no : 88861605218
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US$ 19000.00
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